Relative position change amount detecting apparatus having bi-di

Details Relative position change amount detecting apparatus having bi-di Relative position change amount detecting apparatus having bi-di

1992-12-24

1995-07-11

Epps, Georgia Y.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 369126, G11B 900

Patent

active

054323460

ABSTRACT:
Information detecting apparatus comprises a probe arranged to face an information medium so as to relatively move to the information medium with thereby detect information thereon, a first vibrating device for vibrating the probe relative to the information medium in a first direction parallel with the information medium, and a first movement detecting device for detecting a state of relative displacement of the probe for the information medium in the first direction on the basis of information obtained by the probe which is caused to vibrate by the first vibrating device. A second vibrating device vibrates the probe relative to the information medium in a second direction which is parallel with the surface of the information medium and crosses the first direction, and a second movement detecting device detects a state of relative displacement of the probe with the information medium in the second direction on the basis of information obtain by the probe which is caused to vibrate by the second vibrating device.

REFERENCES:
patent: 4618767 (1986-10-01), Smith et al.
patent: 4992659 (1991-02-01), Abraham et al.
patent: 4998016 (1991-03-01), Nose et al.
D. W. Phol, et al, "Tracking Tunneling Microscopy", Review of Scientific Instrument, vol. 49, No. 6, pp. 840-842 (Jun. 1988).
"Differential Scanning Near-Field Microscope", IBM Technical Disclosure Bulletin, vol. 31, No. 2, pp. 467-468 (Jul. 1988).

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