Relative displacement control apparatus

Details Relative displacement control apparatus Relative displacement control apparatus

1987-07-10

1989-09-12

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

2504421, H01J 3726

Patent

active

048662712

ABSTRACT:
A relative displacement control apparatus provides both coarse and extremely fine precise control over displacements between a sample and a detecting probe as required, e.g. in operations of optical instruments, analyzing instruments and scanning tunneling microscopes. This precise fine displacement is produced through a double-lever-action which is created substantially by means of an arm assembly preferably with a piezoelectric drive for precise displacement control, a support pivotally holding the arm assembly, a rigid arm fixed solidly atop the support and a pointed stop or "foot" fixed in the proximity of the free end of the rigid arm.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4665313 (1987-05-01), Wells
patent: 4668865 (1987-05-01), Gimzewski et al.
patent: 4698502 (1987-10-01), Bedmorz et al.
patent: 4724318 (1988-02-01), Binnig
"Scanning Tunneling Microscope with Micrometer Approach and Thermal Compensation", Jericho et al., Rev. Sci. Inst., vol. 58, No. 8, 8-87.

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