Region-of-interest based electron beam metrology

Details Region-of-interest based electron beam metrology Region-of-interest based electron beam metrology

2007-07-10

2007-07-10

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S492200, C250S492300

Reexamination Certificate

active

11271122

ABSTRACT:
One embodiment relates to a method for metrology using an electron beam apparatus. At least one region of interest is selected in a field of view at a magnification level. Scanning parameters are determined to selectively scan over the at least one regions of interest under the magnification level of the field of view. The electron beam is selectively scanned over the at least one region of interest to capture image data from the at least one region of interest while maintaining the magnification level of the field of view. Other embodiments are also disclosed.

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