Regeneration of ferric chloride etchants

Details Regeneration of ferric chloride etchants Regeneration of ferric chloride etchants

1991-04-03

1993-07-13

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, H01L 2100

Patent

active

052270106

ABSTRACT:
Ferric chloride etching composition is regenerated by introducing such along with oxygen gas into a static mixing zone.

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