Reflective spatial light modulator with encapsulated micro-mecha

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359295, G02B 2600

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active

058352562

ABSTRACT:
A spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. An aperture layer is built into the upper substrate to enable light to reach only the flat mirror surfaces.

REFERENCES:
patent: 3746911 (1973-07-01), Nathanson
patent: 4229732 (1980-10-01), Hartstein
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5216537 (1993-06-01), Hornbeck
patent: 5311360 (1994-05-01), Bloom
patent: 5535047 (1996-07-01), Hornbeck
Jaecklin "Line-Addressable Torsional Micromirrors for Light Modulator Arrays" Sensors & Actuators A, 1994, pp. 324-329, 441-442, Elsevier.
Gerhard-Multhaupt "Light-Valve Projection Displays--an Introduction" Displays, Jan. 1995, pp. 5-7, v16 n1, Elsevier Science, Holland.
Gerhard-Multhaupt "Light-Valve Technologies for High-Definition Television Projection Displays" Displays, 1991, pp. 115-128, v12 n3/4.
Petersen "Micromechanical light modulator Array Fabricated on Silicon" Applied Physics Letters, 15 Oct. 1977, pp. 521-523, v31 n8, Amer. Inst. of Physics.
Cadman "New Micromechanical Display Using Thin Metallic Films" IEEE Electron Device Letters, Jan. 1983, pp.3-4, vEDL-4 n1, IEEE (U.S.A.).
Kuck "Deformable Micromirror Devices as Phase-Mod High Resolution Light Valves" Transducers '95/Eurosensors IX, 29 Jun. 1995, Conf. Proceedings, Stockholm, Sweden.

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