Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2011-03-22
2011-03-22
Sugarman, Scott J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S237000, C359S318000
Reexamination Certificate
active
07911678
ABSTRACT:
A reflective spatial light modulator device features two pairs of electrodes formed on different metallization layers. Elevation of the upper electrode pair reduces its distance from the overlying reflecting surface, thereby requiring a smaller applied voltage to generate an equivalent electrostatic attractive force for altering or maintaining physical orientation of the reflecting surface relative to incident light. In one embodiment, the reduced distance between the electrode and reflecting surface allows operation at lower voltages, reducing the possibility of breakdown and avoiding the need for complex device designs to eliminate such breakdown. In another embodiment, the reduced distance between the electrode and the reflecting surface allows the use of stiffer hinges for the reflecting surface, thereby increasing the speed of device operation. Other embodiments can employ both reduced voltage operation and the use of stiffer hinge structures.
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Kilpatrick Townsend & Stockton LLP
Miradia Inc.
Pinkney Dawayne A
Sugarman Scott J
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