Reflective spatial light modulator

Details Reflective spatial light modulator Reflective spatial light modulator

2006-10-10

2006-10-10

Robinson, Mark A. (Department: 2872)

Optical: systems and elements

Mirror

With support

C359S223100, C359S291000

Reexamination Certificate

active

07118234

ABSTRACT:
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

REFERENCES:
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4317611 (1982-03-01), Petersen
patent: 4566935 (1986-01-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5382961 (1995-01-01), Gale, Jr.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5489952 (1996-02-01), Gove et al.
patent: 5504614 (1996-04-01), Webb et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5600383 (1997-02-01), Hornbeck
patent: 5661591 (1997-08-01), Lin et al.
patent: 5663749 (1997-09-01), Farris et al.
patent: 5742419 (1998-04-01), Dickensheets et al.
patent: 5757536 (1998-05-01), Ricco et al.
patent: 5793519 (1998-08-01), Furlani et al.
patent: 5835256 (1998-11-01), Huibers
patent: 5885468 (1999-03-01), Kozlowski
patent: 5939171 (1999-08-01), Biebl
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6038056 (2000-03-01), Florence et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6049317 (2000-04-01), Thompson et al.
patent: 6127756 (2000-10-01), Iwaki et al.
patent: 6172797 (2001-01-01), Huibers
patent: 6285490 (2001-09-01), Meier et al.
patent: 6295154 (2001-09-01), Laor et al.
patent: 6323982 (2001-11-01), Hornbeck
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6388661 (2002-05-01), Richards
patent: 6396619 (2002-05-01), Huibers et al.
patent: 6429033 (2002-08-01), Gee et al.
patent: 6529310 (2003-03-01), Huibers et al.
patent: 6538800 (2003-03-01), Huibers
patent: 6542653 (2003-04-01), Wu et al.
patent: 6543286 (2003-04-01), Garverick et al.
patent: 6827866 (2004-12-01), Novotny
patent: 6856068 (2005-02-01), Miller et al.
patent: 6891654 (2005-05-01), Kurosawa et al.
patent: 6891655 (2005-05-01), Grebinski et al.
patent: 6914871 (2005-07-01), Hara et al.
patent: 6960305 (2005-11-01), Doan et al.
patent: 2002/0033982 (2002-03-01), Dewenter
patent: 2002/0041455 (2002-04-01), Sawada et al.
patent: 2002/0071166 (2002-06-01), Jin et al.
patent: 2002/0071169 (2002-06-01), Bowers et al.
patent: 2002/0132389 (2002-09-01), Patel et al.
patent: 2003/0117686 (2003-06-01), DiCarlo
patent: 2003/0207487 (2003-11-01), Kubena et al.
patent: 2004/0000696 (2004-01-01), Ma et al.
patent: 2004/0004753 (2004-01-01), Pan
patent: 2004/0008402 (2004-01-01), Patel et al.
patent: 2004/0145822 (2004-07-01), Pan et al.
patent: 2004/0240033 (2004-12-01), Pan et al.
patent: 2005/0041277 (2005-02-01), Huibers
Petersen, K.E., Micromechanical Membrane Switches On Silicon, IBM J. Res. Develop., Jul. 1979, pp. 376-385, vol. 23, No. 4.
Henley , Francois J. and Current, Michael I., “A New SOI Manufacturing Technology Using Atomic Layer Cleaving,” Silicon Genesis Corporation, Campbell, CA, pp. 1-5.
Petersen, K.E., Micromechanical Light Modulator Array Fabricated On Silicon, Applied Physics Letters, Oct. 15, 1977, pp. 521-523, vol. 31, No. 8.

Affiliated with

Also associated with

Rating

Reflective spatial light modulator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reflective spatial light modulator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reflective spatial light modulator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3711734