Reflective coating for electrostatic chucks

Details Reflective coating for electrostatic chucks Reflective coating for electrostatic chucks

2006-12-26

2006-12-26

Mullins, Burton S. (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

07154731

ABSTRACT:
In one embodiment, an electrostatic chuck includes a body having a top surface facing a wafer and a reflective coating over the top surface. The reflective coating is formed on areas of the top surface that do not contact a wafer so as to not appreciably affect the clamping function of the electrostatic chuck. The reflective coating helps raise the operating temperature of the wafer by reflecting heat radiated from the wafer back onto the wafer. In one embodiment, the reflective coating comprises a material that is relatively good in reflecting radiation in the infrared region.

REFERENCES:
patent: 5841624 (1998-11-01), Xu et al.
patent: 6115232 (2000-09-01), Hass et al.
patent: 6426860 (2002-07-01), Schubert et al.
patent: 6916559 (2005-07-01), Murakawa et al.

Affiliated with

Also associated with

Rating

Reflective coating for electrostatic chucks does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reflective coating for electrostatic chucks, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reflective coating for electrostatic chucks will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3716708