Reflection soft X-ray microscope and method

Details Reflection soft X-ray microscope and method Reflection soft X-ray microscope and method

1991-08-23

1993-01-05

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Telescope or microscope

378 84, 378 85, G21K 700

Patent

active

051777746

ABSTRACT:
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.

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Skinner et al., "Contact Microscopy With A Soft X-ray Laser", Journal of Microscopy, vol. 159, Part I, Jul., 1990, pp. 51 through 60.
Howells et al., "X-ray Microscopes", Scientific America, vol. 264, No. 2, Feb., 1991, pp. 88 through 94.
Princeton Plasma Physics Laboratory, PPPL digest, "Soft X-ray Laser Developed At Princeton", Mar., 1987, pp. 1-5.
Princeton Plasma Physics Laboratory, PPPL digest, "X-ray Laser Microscope Developed At Princeton, Progress Toward Shorter Wavelengths Underway", May, 1989, pp. 1-6.

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