Reflection soft X-ray microscope and method

X-ray or gamma ray systems or devices – Specific application – Telescope or microscope

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378 84, 378 85, G21K 700

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active

051777746

ABSTRACT:
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.

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Skinner et al., "Contact Microscopy With A Soft X-ray Laser", Journal of Microscopy, vol. 159, Part I, Jul., 1990, pp. 51 through 60.
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Princeton Plasma Physics Laboratory, PPPL digest, "X-ray Laser Microscope Developed At Princeton, Progress Toward Shorter Wavelengths Underway", May, 1989, pp. 1-6.

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