Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2006-02-14
2006-02-14
Rosasco, S. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
06998200
ABSTRACT:
A reflection photomask includes a reflection layer on a substrate, an absorber pattern on the reflection layer, and a capping layer on the reflection layer. The capping layer may be selected to decrease a reflectivity of the reflection photomask by less than about 20% of the reflectivity of the reflection layer.
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Myers Bigel & Sibley & Sajovec
Rosasco S.
Samsung Electronics Co,. Ltd.
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