Reflection-free ellipsometry measurement apparatus and method fo

Details Reflection-free ellipsometry measurement apparatus and method fo Reflection-free ellipsometry measurement apparatus and method fo

1992-11-12

1995-03-28

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356382, 356244, G01N 2101

Patent

active

054022371

ABSTRACT:
An ellipsometry cell is provided with a transparent lid that is positioned close to a specimen within the cell, thus allowing for a low volume wet chemical treatment of the specimen, and yet prevents interference with the ellipsometry measurements by partial reflections of a probe beam off the outer and inner lid surfaces. This is accomplished by configuring the lid to direct an ellipsometry beam and reflections thereof at different angles, so that the beam but not its reflections enter an ellipsometer analyzer. The lid preferably has an angled outer surface with beam entry and exit windows symmetrically tapering from a central ridge, and its inner surface substantially flat and parallel to the cell base.

REFERENCES:
patent: 4565446 (1986-01-01), Chu
patent: 4582431 (1986-04-01), Cole
patent: 4795262 (1989-01-01), Morris
patent: 4927766 (1990-05-01), Auenbach et al.
patent: 5156461 (1992-10-01), Moslehi et al.
Spanier, Dr. Richard F, "Ellipsometry, a century old new technique", Industrial Research, Sep. 1975, Rudolph Research, 4 pages.

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