Reflecting mask, apparatus for fixing the reflecting mask...

Details Reflecting mask, apparatus for fixing the reflecting mask... Reflecting mask, apparatus for fixing the reflecting mask...

2007-07-24

2010-12-21

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07855034

ABSTRACT:
In a reflecting mask, an apparatus for fixing the reflecting mask and a method of fixing the reflecting mask, voltages are applied to elements of a conductive pattern spaced apart from each other on a rear face of the reflecting mask to fix the reflecting mask by using electrostatic forces. A flatness of the fixed reflecting mask is measured, and the electrostatic forces provided to portions of the reflecting mask are selectively adjusted in accordance with a measured result obtained from the measuring part, such that the reflecting mask is horizontally fixed and is substantially flat.

REFERENCES:
patent: 6352803 (2002-03-01), Tong et al.
patent: 7092231 (2006-08-01), Hoeks et al.
patent: 7623334 (2009-11-01), Mizuno et al.
patent: 2002-299228 (2002-10-01), None
patent: 2005-210093 (2005-08-01), None

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