Reflectance spectroscopic apparatus with toroidal mirrors

Details Reflectance spectroscopic apparatus with toroidal mirrors Reflectance spectroscopic apparatus with toroidal mirrors

1999-10-19

2000-10-03

Evans, F. L.

Optics: measuring and testing

By polarized light examination

Of surface reflection

G01J 400, G01N 2121

Patent

active

061280852

ABSTRACT:
An apparatus uses reflectance spectrophotometry to characterize a sample having any number of thin films. The apparatus uses two toroidal mirrors in an optical relay to direct light reflected by the sample to a spectroscopic device. A computer then analyzes the reflected spectrum to characterize the optical properties of the sample. The optical relay allows a range of angles of reflection from the sample, and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. For polarization-based measurements polarizing elements can be used in the apparatus and the spectroscopic device can be a spectroscopic ellipsometer. The sample is mounted on a movable stage so that different areas of the sample may be characterized. Furthermore, a deflector and a viewer are used to allow the operator of the apparatus to view the region of the sample under study.

REFERENCES:
patent: 5184191 (1993-02-01), Krishnan

Affiliated with

Also associated with

Rating

Reflectance spectroscopic apparatus with toroidal mirrors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reflectance spectroscopic apparatus with toroidal mirrors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reflectance spectroscopic apparatus with toroidal mirrors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-201065