Reducing offset in accelerometers

Details Reducing offset in accelerometers Reducing offset in accelerometers

2005-05-17

2005-05-17

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

06892576

ABSTRACT:
Accelerometer offset is reduced by forming mass support structures within an inner periphery of the mass, affixing the mass support structures to the substrate by at least one anchor positioned near the mass' center of mass, and affixing the sensing fingers proximate to the anchor. The mass support structures can be affixed to the substrate using a single anchor or multiple anchors that are positioned close together. The sensing fingers can be affixed to the substrate or to the mass support structures. The mass is typically suspended from within its periphery but toward its outer periphery.

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Leland “Chip” Spangler et al., “ISAAC—Integrated Silicon, Automotive, Accelerometer, ”Transducers '95 • Eurosensors IX, 4 pages.
International Search Report, Mar. 30, 2004.

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