Reduced splattering of unpassivated laser fuses

Details Reduced splattering of unpassivated laser fuses Reduced splattering of unpassivated laser fuses

2005-03-29

2005-03-29

Pham, Long (Department: 2814)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S132000

Reexamination Certificate

active

06872648

ABSTRACT:
The act of blowing an unpassivated electrical fuse (for example, fuse405) using a laser can result in the splattering of the fuse material and result in electrical short circuits. A blast barrier (for example blast barrier406) formed around an area of the fuse that is blown by the laser helps to contain the splattering of the fuse material. The blast barrier may be formed from the same material as the fuses themselves and, therefore, can be created in the same fabrication step.

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