Reduced gas flow purging system in reflectometer,...

Details Reduced gas flow purging system in reflectometer,... Reduced gas flow purging system in reflectometer,...

2008-09-16

2008-09-16

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S367000

Reexamination Certificate

active

11704545

ABSTRACT:
Reflectometer, ellipsometer, polarimeter or the like system, which functionally comprise means for providing gas confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.

REFERENCES:
patent: 4824248 (1989-04-01), Neumann
patent: 5582646 (1996-12-01), Woollam et al.
patent: 6628397 (2003-09-01), Nikoonahad et al.
patent: 6813026 (2004-11-01), McAninch

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