Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1993-12-09
1995-03-28
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250311, H01J 37295
Patent
active
054019648
ABSTRACT:
A method of imaging a specimen by transmission of electrons with energies below 1 MeV including the steps of passing a beam of electrons having energies that are less than 1 MeV through the specimen to produce a first transmitted electron beam; passing the first transmitted electron beam through an imaging screen to generate a light image and a second transmitted electron beam; preventing more than about 95% of the second transmitted electron beam from reflecting back to the imaging screen; and focusing the generated light image onto an electronic camera. The imaging screen includes a support structure and a light generating layer, in which the support structure has a thickness that is less than one half the Kanaya-Okayama range of electrons in the imaging screen.
REFERENCES:
patent: 3560792 (1971-02-01), Goetze et al.
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4739399 (1988-04-01), Swann et al.
patent: 4851670 (1989-07-01), Krivanek
patent: 5065029 (1991-11-01), Krivanek
patent: 5277932 (1994-01-01), Spencer
Herrmann, K.-H., "Electron Image Conversion", Proceedings of the 64th Annual Meeting of the Electron Microscopy Society of America, 1986, pp. 78-81.
Kraus, B. et al., "Performance of Newvicon and CCD Real-Time EM Observation Systems", Proc. XITH Int. Cong. On Electron Microscopy, Kyoto, 1986, pp. 455-456.
Matsuura S. et al., Proc. XITH Int. Cong. On Electron Microscopy, Kyoto, 1986.
LandOfFree
Reduced electron scattering phosphor screen for high resolution does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Reduced electron scattering phosphor screen for high resolution , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reduced electron scattering phosphor screen for high resolution will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2252299