Reduced electron scattering phosphor screen for high resolution

Radiant energy – Inspection of solids or liquids by charged particles – Methods

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250311, H01J 37295

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active

054019648

ABSTRACT:
A method of imaging a specimen by transmission of electrons with energies below 1 MeV including the steps of passing a beam of electrons having energies that are less than 1 MeV through the specimen to produce a first transmitted electron beam; passing the first transmitted electron beam through an imaging screen to generate a light image and a second transmitted electron beam; preventing more than about 95% of the second transmitted electron beam from reflecting back to the imaging screen; and focusing the generated light image onto an electronic camera. The imaging screen includes a support structure and a light generating layer, in which the support structure has a thickness that is less than one half the Kanaya-Okayama range of electrons in the imaging screen.

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Herrmann, K.-H., "Electron Image Conversion", Proceedings of the 64th Annual Meeting of the Electron Microscopy Society of America, 1986, pp. 78-81.
Kraus, B. et al., "Performance of Newvicon and CCD Real-Time EM Observation Systems", Proc. XITH Int. Cong. On Electron Microscopy, Kyoto, 1986, pp. 455-456.
Matsuura S. et al., Proc. XITH Int. Cong. On Electron Microscopy, Kyoto, 1986.

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