Recycling of electrochemical-mechanical planarization (ECMP)...

Details Recycling of electrochemical-mechanical planarization (ECMP)... Recycling of electrochemical-mechanical planarization (ECMP)...

2007-02-23

2010-10-26

Drodge, Joseph W (Department: 1797)

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

C204S571000, C210S634000, C210S663000, C210S669000, C210S787000, C210S806000, C210S805000, C439S691000, C439S692000, C439S693000, C451S036000, C451S060000, C451S446000

Reexamination Certificate

active

07820051

ABSTRACT:
A method, process and system for the recycling of electrochemical-mechanical planarization slurries/electrolytes as they are used in the back end of line of the semiconductor wafer manufacturing process is disclosed. The method, process and system includes with the removal of metal ions from slurries using ion exchange media and/or electrochemical deposition.

REFERENCES:
patent: 3582290 (1971-06-01), Grinstead
patent: 4215009 (1980-07-01), Spaziante et al.
patent: 4664808 (1987-05-01), Kim
patent: 5664990 (1997-09-01), Adams et al.
patent: 5770085 (1998-06-01), Wai et al.
patent: 6106728 (2000-08-01), Iida et al.
patent: 6267644 (2001-07-01), Molnar
patent: 6346195 (2002-02-01), Filson et al.
patent: 6390890 (2002-05-01), Molnar
patent: 6482325 (2002-11-01), Corlett et al.
patent: 6641463 (2003-11-01), Molnar
patent: 6866784 (2005-03-01), Chang et al.
patent: 7059943 (2006-06-01), Cann et al.
patent: 7223344 (2007-05-01), Zavattari et al.
patent: 2002/0111121 (2002-08-01), Sun et al.
patent: 2003/0116446 (2003-06-01), Duboust et al.
patent: 2004/0129636 (2004-07-01), Monzyk et al.
http://people.clarkson.edu/˜samoy/ECMP.htm, Chemical Mechanical Planarization (CMP) and Electrochemical Mechanical Planarization (ECMP), Dec. 13, 2006 p. 1-5.

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