Reciprocating megasonic probe

Details Reciprocating megasonic probe Reciprocating megasonic probe

2007-03-06

2007-03-06

Markoff, Alexander (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S001000, C134S033000, C134S184000, C134S902000

Reexamination Certificate

active

10140029

ABSTRACT:
A method of cleaning a substrate comprises placing the substrate on a rotating fixture, placing a liquid on at least one side of the substrate, and creating a standing wave of megasonic energy oriented generally parallel to the substrate. The standing wave generates an associated pattern of high-agitation regions in the liquid. The method further comprises moving the standing wave back-and-forth so as to move the pattern of high-agitation regions about with respect to the substrate. An apparatus for cleaning substrates comprises a support to rotate the substrate about a first axis, and a transmitter extending generally parallel to a surface of the substrate. The apparatus further comprises a megasonic transducer in acoustically coupled relation to the transmitter, and a reciprocation drive in fixed relation to the transmitter. The reciprocation drive moves the transmitter back-and-forth within a plane generally parallel to the surface of the substrate.

REFERENCES:
patent: 4537511 (1985-08-01), Frei
patent: 4902350 (1990-02-01), Steck
patent: 5038808 (1991-08-01), Hammond et al.
patent: 5980647 (1999-11-01), Buker et al.
patent: 6021789 (2000-02-01), Akatsu et al.
patent: 6039059 (2000-03-01), Bran
patent: 6140744 (2000-10-01), Bran
patent: 6178974 (2001-01-01), Kobayashi et al.
patent: 6199563 (2001-03-01), Uehara et al.
patent: 6276370 (2001-08-01), Fisch et al.
patent: 6367493 (2002-04-01), Schuler et al.
patent: 6539952 (2003-04-01), Itzkowitz
patent: 6684890 (2004-02-01), Nicolosi et al.
patent: 6843257 (2005-01-01), Yeo et al.
patent: 2002/0029788 (2002-03-01), Verhaverbeke et al.
patent: 2002/0185155 (2002-12-01), Franklin
patent: 62-173935 (1967-07-01), None
patent: 61-179159 (1986-07-01), None
IBM Technical Disclosure Bulletin—vol. 37 No. 06A Jun. 1994.

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