Realization of an atomic source of metallic ions producing a sur

Details Realization of an atomic source of metallic ions producing a sur Realization of an atomic source of metallic ions producing a sur

1992-03-23

1993-12-28

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250423F, 2504922, H01J 3730

Patent

active

052742342

ABSTRACT:
An electric field having a strength of approximately 15 V
m is applied between a tungsten tip and a metallic substrate. Concomitantly, the tip is heated to a temperature less than the bulk melting temperature of the tungsten tip. Atoms at the surface of the tip move and form a pyramidal protrusion of nanometer scale on the tip. Topmost atoms on the protrusion are charged and form a coherent beam useful for writing atomic scale structures on the substrate.

REFERENCES:
patent: 3864572 (1975-02-01), Van Der Mast et al.
patent: 4954711 (1990-09-01), Fink et al.
patent: 5038034 (1991-08-01), Fujita
patent: 5043578 (1991-08-01), Gethner et al.

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