Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1992-03-23
1993-12-28
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250423F, 2504922, H01J 3730
Patent
active
052742342
ABSTRACT:
An electric field having a strength of approximately 15 V
m is applied between a tungsten tip and a metallic substrate. Concomitantly, the tip is heated to a temperature less than the bulk melting temperature of the tungsten tip. Atoms at the surface of the tip move and form a pyramidal protrusion of nanometer scale on the tip. Topmost atoms on the protrusion are charged and form a coherent beam useful for writing atomic scale structures on the substrate.
REFERENCES:
patent: 3864572 (1975-02-01), Van Der Mast et al.
patent: 4954711 (1990-09-01), Fink et al.
patent: 5038034 (1991-08-01), Fujita
patent: 5043578 (1991-08-01), Gethner et al.
Binh Vu T.
Garcia Nicolas G.
Anderson Bruce C.
Universidad Autonoma de Madrid
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