Real-time scanner-nonlinearity error correction for HDVSI

Details Real-time scanner-nonlinearity error correction for HDVSI Real-time scanner-nonlinearity error correction for HDVSI

2011-03-01

2011-03-01

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07898672

ABSTRACT:
An error correction for scanner position is implemented by adjusting the filter parameters of the quadrature demodulation module of an HDVSI algorithm using a reference signal from an independent position measurement device (PMD). The step size generated by the PMD at each scanner step is substituted for the nominal scanner step in the quadrature demodulation algorithm calculating phase and in the coherent envelope algorithm calculating peak. This substitution eliminates all errors produced by scanner nonlinearities. Furthermore, over the large number of steps carried out during a normal scanning range, random scanner-position errors (such as produced by vibration and other system noise) are automatically corrected by integration over their normal distribution around the noise-free position value. Therefore, a complete correction of scanner-position error may be achieved using the reference signal.

REFERENCES:
patent: 5706085 (1998-01-01), Blossey et al.
patent: 5777741 (1998-07-01), Deck
patent: 6624893 (2003-09-01), Schmit et al.
patent: 6624894 (2003-09-01), Olszak et al.
patent: 6987570 (2006-01-01), Schmit et al.
patent: 7277183 (2007-10-01), Deck
patent: 7283250 (2007-10-01), Schmit et al.
patent: 7321430 (2008-01-01), Deck
patent: 7605925 (2009-10-01), Chen
Matthias Fleischer et al., “Fast Algorithms for Data Reduction in Modern Optical . . . ,” Applied Optics, vol. 39, No. 8, Mar. 10, 2000.

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