Real time monitoring system of semiconductor manufacturing...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S108000, C707S793000, C345S418000

Reexamination Certificate

active

10951154

ABSTRACT:
The present disclosure provides a system for monitoring semiconductor manufacturing in real time which includes an icon module with a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture, a layout module which includes a database for storing information on a layout of a semiconductor manufacturing facility to provide stored information on the layout, and a joiner module, which is receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility. Upon merging, the icons are accessible in the merged graphical display to display real time information relating to semiconductor manufacture.

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