Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2007-07-10
2007-07-10
Estrada, Michelle (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257SE21521, C324S071400, C324S464000
Reexamination Certificate
active
10814883
ABSTRACT:
An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.
REFERENCES:
patent: 4222045 (1980-09-01), Cholin
patent: 4598280 (1986-07-01), Bradford
patent: 5192701 (1993-03-01), Iwasaki
patent: 5247827 (1993-09-01), Shah
patent: 5440122 (1995-08-01), Yasutake
patent: 5457396 (1995-10-01), Mori et al.
patent: 6928892 (2005-08-01), Storbeck et al.
patent: 7038460 (2006-05-01), Skinner
patent: 2002/0028399 (2002-03-01), Nakasuji et al.
patent: 2004/0031928 (2004-02-01), Smith
patent: 2004/0194556 (2004-10-01), Shu et al.
Fish & Richardson P.C.
Regents of The University of Minnesota
LandOfFree
Real-time monitoring of particles in semiconductor vacuum... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Real-time monitoring of particles in semiconductor vacuum..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Real-time monitoring of particles in semiconductor vacuum... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3765197