Real-time in-line testing of semiconductor wafers

Details Real-time in-line testing of semiconductor wafers Real-time in-line testing of semiconductor wafers

2005-06-28

2005-06-28

Sarkar, Asok Kumar (Department: 2829)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

C438S016000, C438S514000

Reexamination Certificate

active

06911350

ABSTRACT:
An apparatus and method for the real-time, in-line testing of semiconductor wafers during the manufacturing process. In one embodiment the apparatus includes a probe assembly within a semiconductor wafer processing line. As each wafer passes adjacent the probe assembly, a source of modulated light, within the probe assembly, having a predetermined wavelength and frequency of modulation, impinges upon the wafer. A sensor in the probe assembly measures the surface photovoltage induced by the modulated light. A computer then uses the induced surface photovoltage to determine various electrical characteristics of the wafer.

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