Real-time effective-wavelength error correction for HDVSI

Details Real-time effective-wavelength error correction for HDVSI Real-time effective-wavelength error correction for HDVSI

2011-06-07

2011-06-07

Nguyen, Ha Tran T (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C356S516000

Reexamination Certificate

active

07956630

ABSTRACT:
An error correction for effective-wavelength variations is implemented by adjusting the filter parameters of the quadrature demodulation algorithm of a high definition vertical scanning process using a phase step that accounts for phase-step changes associated with variations in the effective wavelength irradiating the sample when the surface is curved. The nominal phase step is replaced in the filter with an actual phase step size that includes a phase parameter generated for each pixel by calibration or modeling of a specific type of surface. This substitution eliminates all errors produced by surface-dependent variations in the effective wavelength of the irradiating light.

REFERENCES:
patent: 5471303 (1995-11-01), Ai et al.
patent: 5633715 (1997-05-01), Ai et al.
patent: 6987570 (2006-01-01), Schmit et al.

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