Boots – shoes – and leggings
Patent
1993-09-20
1995-12-26
Voeltz, Emanuel T.
Boots, shoes, and leggings
364148, 364552, 364164, 364468, 437 7, 437939, G06F 1546
Patent
active
054793408
ABSTRACT:
Hotelling's T.sup.2 statistical analysis and control is used to provide multivariate analysis of components of an RF spectra for real time, in-situ control of an ongoing semiconductor process. An algorithm calculates the T.sup.2 value which is then used to generate a feedback signal, if the T.sup.2 value is out of range, to indicate an out-of-tolerance condition.
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1982-ASQC Quality Congress Transactions--Detroit, Multivariate Quality Control: State of the Art, Frank B. Alt, May 1982, pp. 886-893.
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Statistical Methods for Quality Improvement, Thomas P. Ryan, Chapter 9, Multivariate Control Charts for Measurement Data, John Wiley & Sons, Inc. 1989, pp. 215-229.
Fox Edward P.
Kappuswamy Chandru
Intel Corporation
Kidd William W.
Miller Craig Steven
Sematech Inc.
Voeltz Emanuel T.
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