Real-time compensation of mechanical position error in...

Details Real-time compensation of mechanical position error in... Real-time compensation of mechanical position error in...

2008-07-08

2008-07-08

Berman, Jack I. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C356S500000, C356S508000, C356S340000, C356S329000, C356S329000, C356S365000, C356S400000, C356S401000, C356S498000, C355S053000, C033S00100V

Reexamination Certificate

active

11241794

ABSTRACT:
Improved systems, apparatus, and methods for detecting positions of moving stages and accurately compensating position error during operation (in “real time”) are provided. For some embodiments, rather than rely on two dimensional position measurements, measurements in at least three dimensions may be taken allowing compensation for pitch and roll and, therefore, more accurate position measurements. Further, by including a measurement of a beam column, compensation for movement of the beam may be performed.

REFERENCES:
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6160628 (2000-12-01), Inoue
patent: 2007/0076216 (2007-04-01), Eckes et al.

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