Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2004-09-01
2008-09-23
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
C427S255230, C427S255280
Reexamination Certificate
active
07427425
ABSTRACT:
Reactors having gas distributors for depositing materials onto micro-device workpieces, systems that include such reactors, and methods for depositing materials onto micro-device workpieces. In one embodiment, a reactor for depositing materials onto a micro-device workpiece includes a reaction chamber, a passageway, and a door assembly. The reaction chamber includes a gas distributor configured to provide a flow of gas(es) to a micro-device workpiece on a workpiece holder. The passageway, which has a first end open to the reaction chamber and a second end apart from the reaction chamber, is configured to provide ingression to and egression from the chamber for processing the micro-device workpiece. The door assembly is configured to open and sealably close a door at the second end of the passageway. A gas conditioning system positioned in the door is configured to maintain a desired concentration and phase of gas constituents in the passageway.
REFERENCES:
patent: 2508500 (1950-05-01), de Lange
patent: 3522836 (1970-08-01), King
patent: 3618919 (1971-11-01), Beck
patent: 4289061 (1981-09-01), Emmett
patent: 4313783 (1982-02-01), Davies et al.
patent: 4388342 (1983-06-01), Suzuki et al.
patent: 4436674 (1984-03-01), McMenamin
patent: 4438724 (1984-03-01), Doehler et al.
patent: 4509456 (1985-04-01), Kleinert et al.
patent: 4545136 (1985-10-01), Izu et al.
patent: 4593644 (1986-06-01), Hanak
patent: 4738295 (1988-04-01), Genser et al.
patent: 4780178 (1988-10-01), Yoshida et al.
patent: 4832115 (1989-05-01), Albers et al.
patent: 4871417 (1989-10-01), Nishizawa et al.
patent: 4894132 (1990-01-01), Tanaka
patent: 4911638 (1990-03-01), Bayne et al.
patent: 4923715 (1990-05-01), Matsuda et al.
patent: 4948979 (1990-08-01), Munakata et al.
patent: 4949669 (1990-08-01), Ishii et al.
patent: 5015330 (1991-05-01), Okumura et al.
patent: 5017404 (1991-05-01), Paquet et al.
patent: 5020476 (1991-06-01), Bay et al.
patent: 5062446 (1991-11-01), Anderson
patent: 5076205 (1991-12-01), Vowles et al.
patent: 5090985 (1992-02-01), Soubeyrand
patent: 5172849 (1992-12-01), Barten et al.
patent: 5223113 (1993-06-01), Kaneko et al.
patent: 5286296 (1994-02-01), Sato et al.
patent: 5325020 (1994-06-01), Campbell et al.
patent: 5364219 (1994-11-01), Takahashi et al.
patent: 5366557 (1994-11-01), Yu
patent: 5433787 (1995-07-01), Suzuki et al.
patent: 5445491 (1995-08-01), Nakagawa et al.
patent: 5453124 (1995-09-01), Moslehi et al.
patent: 5474612 (1995-12-01), Sato et al.
patent: 5477623 (1995-12-01), Tomizawa et al.
patent: 5496410 (1996-03-01), Fukuda et al.
patent: 5498292 (1996-03-01), Ozaki
patent: 5532190 (1996-07-01), Goodyear et al.
patent: 5536317 (1996-07-01), Crain et al.
patent: 5562800 (1996-10-01), Kawamura et al.
patent: 5575883 (1996-11-01), Nishikawa et al.
patent: 5589110 (1996-12-01), Motoda et al.
patent: 5592581 (1997-01-01), Okase
patent: 5626936 (1997-05-01), Alderman
patent: 5640751 (1997-06-01), Faria
patent: 5683538 (1997-11-01), O'Neill et al.
patent: 5693288 (1997-12-01), Nakamura
patent: 5716796 (1998-02-01), Bull et al.
patent: 5733375 (1998-03-01), Fukuda et al.
patent: 5746434 (1998-05-01), Boyd et al.
patent: 5754297 (1998-05-01), Nulman
patent: 5766364 (1998-06-01), Ishida et al.
patent: 5769950 (1998-06-01), Takasu et al.
patent: 5769952 (1998-06-01), Asakawa
patent: 5772771 (1998-06-01), Li et al.
patent: 5803938 (1998-09-01), Yamaguchi et al.
patent: 5819683 (1998-10-01), Ikeda et al.
patent: 5820641 (1998-10-01), Gu et al.
patent: 5820686 (1998-10-01), Moore
patent: 5827370 (1998-10-01), Gu
patent: 5851294 (1998-12-01), Young et al.
patent: 5866986 (1999-02-01), Pennington
patent: 5868159 (1999-02-01), Loan et al.
patent: 5879516 (1999-03-01), Kasman
patent: 5885425 (1999-03-01), Hsieh et al.
patent: 5902403 (1999-05-01), Aitani et al.
patent: 5911238 (1999-06-01), Bump et al.
patent: 5936829 (1999-08-01), Moslehi
patent: 5940684 (1999-08-01), Shakuda et al.
patent: 5958140 (1999-09-01), Arami et al.
patent: 5961775 (1999-10-01), Fujimura et al.
patent: 5963336 (1999-10-01), McAndrew et al.
patent: 5997588 (1999-12-01), Goodwin et al.
patent: 5998932 (1999-12-01), Lenz
patent: 6006694 (1999-12-01), DeOrnellas et al.
patent: 6016611 (2000-01-01), White et al.
patent: 6022483 (2000-02-01), Aral
patent: 6039557 (2000-03-01), Unger et al.
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6089543 (2000-07-01), Freerks
patent: 6090210 (2000-07-01), Ballance et al.
patent: 6113698 (2000-09-01), Raaijmakers et al.
patent: 6142163 (2000-11-01), McMillin et al.
patent: 6143078 (2000-11-01), Ishikawa et al.
patent: 6159297 (2000-12-01), Herchen et al.
patent: 6159298 (2000-12-01), Saito et al.
patent: 6174366 (2001-01-01), Ihantola
patent: 6178660 (2001-01-01), Emmi et al.
patent: 6183563 (2001-02-01), Choi et al.
patent: 6190459 (2001-02-01), Takeshita et al.
patent: 6192827 (2001-02-01), Homgqing
patent: 6193802 (2001-02-01), Pang et al.
patent: 6194628 (2001-02-01), Pang et al.
patent: 6197119 (2001-03-01), Dozoretz et al.
patent: 6200415 (2001-03-01), Maraschin
patent: 6206967 (2001-03-01), Mak et al.
patent: 6207937 (2001-03-01), Stoddard et al.
patent: 6251190 (2001-06-01), Mak et al.
patent: 6255222 (2001-07-01), Xia et al.
patent: 6263829 (2001-07-01), Schneider et al.
patent: 6264788 (2001-07-01), Tomoyasu et al.
patent: 6273954 (2001-08-01), Nishikawa et al.
patent: 6277757 (2001-08-01), Lin et al.
patent: 6277763 (2001-08-01), Kugimiya et al.
patent: 6280584 (2001-08-01), Kumar et al.
patent: 6294394 (2001-09-01), Erickson et al.
patent: 6309161 (2001-10-01), Hofmeister
patent: 6328803 (2001-12-01), Rolfson et al.
patent: 6333272 (2001-12-01), McMillin et al.
patent: 6334928 (2002-01-01), Sekine et al.
patent: 6347918 (2002-02-01), Blahnik
patent: 6364219 (2002-04-01), Zimmerman et al.
patent: 6383300 (2002-05-01), Saito et al.
patent: 6402806 (2002-06-01), Schmitt et al.
patent: 6402849 (2002-06-01), Kwag et al.
patent: 6415736 (2002-07-01), Hao et al.
patent: 6425168 (2002-07-01), Takaku et al.
patent: 6486081 (2002-11-01), Ishikawa et al.
patent: 6506254 (2003-01-01), Bosch et al.
patent: 6508268 (2003-01-01), Kouketsu et al.
patent: 6541353 (2003-04-01), Sandhu et al.
patent: 6551929 (2003-04-01), Kori et al.
patent: 6562141 (2003-05-01), Clarke
patent: 6580174 (2003-06-01), McCormick et al.
patent: 6585823 (2003-07-01), Van Wijck
patent: 6593644 (2003-07-01), Chiu et al.
patent: 6602346 (2003-08-01), Gochberg et al.
patent: 6622104 (2003-09-01), Wang et al.
patent: 6638672 (2003-10-01), Deguchi
patent: 6663713 (2003-12-01), Robles et al.
patent: 6666982 (2003-12-01), Brcka
patent: 6673196 (2004-01-01), Oyabu
patent: 6689220 (2004-02-01), Nguyen
patent: 6770145 (2004-08-01), Saito et al.
patent: 6787463 (2004-09-01), Mardian et al.
patent: 6800139 (2004-10-01), Shinriki et al.
patent: 6800172 (2004-10-01), Carpenter et al.
patent: 6807971 (2004-10-01), Saito et al.
patent: 6814813 (2004-11-01), Dando et al.
patent: 6828218 (2004-12-01), Kim et al.
patent: 6830652 (2004-12-01), Ohmi et al.
patent: 6838114 (2005-01-01), Carpenter et al.
patent: 6845734 (2005-01-01), Carpenter et al.
patent: 6849131 (2005-02-01), Chen et al.
patent: 6858264 (2005-02-01), Dando et al.
patent: 6861356 (2005-03-01), Matsuse et al.
patent: 6881295 (2005-04-01), Nagakura et al.
patent: 6887521 (2005-05-01), Basceri
patent: 6905547 (2005-06-01), Londergan et al.
patent: 6905549 (2005-06-01), Okuda et al.
patent: 6966936 (2005-11-01), Yamasaki et al.
patent: 6991684 (2006-01-01), Kannan et al.
patent: 7022184 (2006-04-01), Van Wijck
patent: 7056806 (2006-06-01), Basceri et al.
patent: 7086410 (2006-08-01), Chouno et al.
patent: 7153396 (2006-12-01), Genser et al.
patent: 2001/0001952 (2001-05-01), Nishizawa et al.
patent: 2001/0012697 (2001-08-01), Mikata
patent: 2001/0020447 (2001-09-01), Murugesh et al.
patent: 2001/0050267 (2001-12-01), Hwang et al.
patent: 2001/0054484 (2001-12-01), Komino
patent: 2002/0000202 (2002-01-01), Yuda et al.
patent: 2002/0007790 (2002-01-01), Park
patent: 2002/0016044 (2002-02-01), Dreybrodt et al.
patent: 2002/0042205 (2002-04-01), McMillin et al.
p
Carpenter Craig M.
Dando Ross S.
Dynka Danny
Meeks Timothy
Micro)n Technology, Inc.
Perkins Coie LLP
Stouffer Kelly M
LandOfFree
Reactors with isolated gas connectors and methods for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Reactors with isolated gas connectors and methods for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reactors with isolated gas connectors and methods for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3975355