Reactor monitoring system and method

Details Reactor monitoring system and method Reactor monitoring system and method

1988-06-23

1989-08-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118712, 118 501, 118620, 156627, 156643, 156646, 156345, 20419213, 20419233, 204298, 427 8, 427 38, H01L 21306, B44C 122, B05D 306, C23C 1400

Patent

active

048571369

ABSTRACT:
System and method for detecting problems and other conditions in a semiconducting processing reactor. The relative amounts of two or more substances are monitored, and an output signal is provided when the relative amounts change in a manner corresponding to the change or condition to be detected. In one disclosed embodiment, the substances are ionized to produce excited molecules of the substances, and the substances are sensed with photosensors which are responsive to light of wavelengths characteristic of the substances.

REFERENCES:
patent: 4491499 (1985-01-01), Jerde et al.
patent: 4611919 (1986-09-01), Brooks et al.

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