Reactor loading apparatus

Details Reactor loading apparatus Reactor loading apparatus

1975-04-14

1977-02-22

Sheridan, Robert G.

214 1BB, B65G 4900

Patent

active

040088154

ABSTRACT:
Apparatus for transporting a susceptor carrying semiconductor wafers into and out of a horizontally extending reaction chamber. The apparatus comprises a traveling fork and carriage assembly pivotally mounted on a base for carrying the susceptor into and out of the reactor and lifting the susceptor between raised and lowered positions. Means is included for sensing the presence of a susceptor on the fork assembly and programming the apparatus accordingly for a loading or unloading operation.

REFERENCES:
patent: 3313429 (1967-04-01), Cole
patent: 3848754 (1974-11-01), Bryntse
patent: 3853230 (1974-12-01), Schultz
patent: 3854616 (1974-12-01), Willis et al.

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