Reactive multilayer synthesis of hard ceramic foils and films

Details Reactive multilayer synthesis of hard ceramic foils and films Reactive multilayer synthesis of hard ceramic foils and films

1993-11-26

1996-02-13

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419216, 4273767, 4273768, 427405, C23C 1434

Patent

active

054909112

ABSTRACT:
A method for synthesizing hard ceramic materials such as carbides, borides nd aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coild as a tape for later use.

REFERENCES:
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patent: 4594294 (1986-06-01), Eichen et al.
patent: 5156725 (1992-10-01), Doktycz et al.
patent: 5238711 (1993-08-01), Barron et al.
patent: 5252360 (1993-10-01), Huttl et al.
patent: 5270081 (1993-12-01), Manier et al.

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