Reactive gas filter

Details Reactive gas filter Reactive gas filter

2006-11-07

2006-11-07

Lawrence, Frank M. (Department: 1724)

Gas separation: apparatus

Solid sorbent apparatus

Plural diverse separating means

C096S138000, C096S153000, C055S523000

Reexamination Certificate

active

07132011

ABSTRACT:
In preferred embodiments, the invention provides a gas filter for a reactive gas used in semiconductor processing tools and processes that are sensitive to molecular contamination. The reactive gas filter of the invention have improved pressure drop and can supply an output gas stream having concentrations of less than about 1 ppbv for both ammonia and sulfur dioxide for an input gas stream with ammonia and sulfur dioxide concentrations, respectively, of no greater than about 10 ppbv and 5 ppbv. In one aspect the invention provides a reactive gas filter with an improved pressure drop that can supply an output gas stream having concentrations of less than about 1 ppbv for both ammonia and sulfur dioxide for an input gas stream with ammonia and sulfur dioxide concentrations, respectively, of no greater than about 10 ppbv and 5 ppbv, using a filter media volume of no greater than about 0.5 liters.

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Copy of International Search Report, 2004.

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