Rapid IR transmission thermometry for wafer temperature sensing

Details Rapid IR transmission thermometry for wafer temperature sensing Rapid IR transmission thermometry for wafer temperature sensing

1998-03-31

2000-05-16

Bennett, G. Bradley

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

374121, 374124, 374126, 374128, 374131, 374137, G01J 510, G01N 2500

Patent

active

060627298

ABSTRACT:
A method and apparatus for measuring the temperature of an object, such as a substrate, during processing. The object is illuminated by a light source. Infrared light that is transmitted through the object is then collected and transmitted to a photodiode. The amount of light transmitted through the substrate varies as a function of substrate temperature. The photodiode generates a signal in response to the light transmitted to the photodiode and an analyzing device generates a real-time temperature reading based on the signal. The photodiode may include at least one silicon photodiode or a plurality of photodiodes made from germanium or indium/gallium/arsenide.

REFERENCES:
patent: 4956538 (1990-09-01), Moslehi
patent: 5183338 (1993-02-01), Wickersheim
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5270222 (1993-12-01), Moslehi
patent: 5326171 (1994-07-01), Thompson et al.
patent: 5568978 (1996-10-01), Johnson et al.
"Model DRS 1000 for In-Situ Temperature Measurement"; commercial literature from Thermionics Northwest Inc.; 2 pages, (no date).

Affiliated with

Also associated with

Rating

Rapid IR transmission thermometry for wafer temperature sensing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rapid IR transmission thermometry for wafer temperature sensing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rapid IR transmission thermometry for wafer temperature sensing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-253114