Rapid cycle time gas burster

Details Rapid cycle time gas burster Rapid cycle time gas burster

2007-11-27

2007-11-27

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S298070, C204S298330, C156S345290, C156S345330, C118S715000, C118S7230ER, C118S7230ER, C427S569000, C427S248100, C427S255230, C216S058000, C216S067000

Reexamination Certificate

active

10689057

ABSTRACT:
An apparatus for rapidly establishing at least one preselected gas pressure in a process chamber comprising:(a) a chamber defining an interior space adapted to be maintained at a reduced pressure; and(b) a gas supply means for supplying at least one burst of gas to the chamber for rapidly establishing the at least one preselected gas pressure in the chamber, the gas supply means including:(i) a source of the gas;(ii) a supply ballast fluidly connected to the gas source for receiving the gas from the source;(iii) at least one burst ballast fluidly connected to the supply ballast via a metering valve for receiving the gas from the supply ballast; and(iv) an on/off valve fluidly connected to the at least one burst ballast and the chamber for supplying the process chamber with the gas from the at least one burst ballast.

REFERENCES:
patent: 4989160 (1991-01-01), Garrett et al.
patent: 5049251 (1991-09-01), Inoue
patent: 5873942 (1999-02-01), Park et al.
patent: 5879461 (1999-03-01), Adams
patent: 5907220 (1999-05-01), Tepman et al.
patent: 5942089 (1999-08-01), Sproul et al.
patent: 6080286 (2000-06-01), Okuda et al.
patent: 6103069 (2000-08-01), Davenport
patent: 6537428 (2003-03-01), Xiong et al.
patent: 2003/0064253 (2003-04-01), Uwazumi et al.

Affiliated with

Also associated with

Rating

Rapid cycle time gas burster does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rapid cycle time gas burster, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rapid cycle time gas burster will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3808299