Random access MOS memory cell using double level polysilicon

Static information storage and retrieval – Systems using particular element – Capacitors

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357 23, 365182, G11C 1140, G11C 1124

Patent

active

044674503

ABSTRACT:
A cell design for an MOS random access memory is disclosed. Two levels of polycrystalline silicon are used, one for the bias voltage side of the storage capacitors and another for the gates of the MOS transistors and as the bit select line or to connect the gates to the bit select line. The bit select or X address line may overlie both the first and/or second level poly, so space is saved in the cell layout. A "V-groove" anisotropically etched storage capacitor may include the MOS access transistor in one end, formed by double implant.

REFERENCES:
patent: 4012757 (1977-03-01), Koo

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