Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system
Reexamination Certificate
2006-04-25
2006-04-25
Lee, John R. (Department: 2881)
Radiant energy
Invisible radiant energy responsive electric signalling
Semiconductor system
C250S370090, C250S365000, C250S50400H, C250S372000, C250S363100, C359S350000, C359S359000, C362S296040, C362S302000
Reexamination Certificate
active
07034308
ABSTRACT:
A radiation system includes a contamination barrier, e.g., a foil trap, between a collector, for example a normal incidence collector, and a radiation source, such that radiation coming from the source passes the foil trap twice. The radiation passes the contamination barrier once before hitting the collector and a second time after reflection by the collector. The foil trap includes lamellas that are parallel to both the radiation coming from the light source, and to the radiation reflected by the collector. The radiation is thus not obstructed by the foil trap. In this way, a normal incidence collector, which is used with a plasma produced source, can be protected from debris coming from a EUV source.
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Bakker Levinus Pieter
Banine Vadim Yevgenyevich
Kurt Ralph
Schuurmans Frank Jeroen Pieter
Sidelnikov Yurii Victorovitch
ASML Netherlands B.V.
Lee John R.
Pillsbury Winthrop Shaw & Pittman LLP
Souw Bernard E.
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