Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2011-01-04
2011-01-04
Porta, David P (Department: 2884)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S034000
Reexamination Certificate
active
07863591
ABSTRACT:
An optical sensor apparatus for use in an extreme ultraviolet lithographic system is disclosed. The apparatus includes an optical sensor comprising a sensor surface and a removal mechanism configured to remove debris from the sensor surface. Accordingly, dose and/or contamination measurements may be carried out conveniently for the lithographic system.
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Banine Vadim Yevgenyevich
Driessen Niels Machiel
Franken Johannes Christiaan Leonardus
Frijns Olav Waldemar Vladimir
Klunder Derk Jan Wilfred
ASML Netherlands B.V.
Gaworecki Mark R
Koninklijke Philips Electronics , N.V.
Porta David P
Sterne Kessler Goldstein & Fox P.L.L.C.
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