Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1992-12-31
1994-12-13
Chea, Thorl
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430910, G03C 176
Patent
active
053729129
ABSTRACT:
The present invention relates to a radiation-sensitive resist composition and the process for its use in the manufacture of integrated circuits. The composition comprises a radiation-sensitive acid generator, a binder soluble in aqueous base and an acrylate copolymer having acid labile pendant groups.
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Allen Robert D.
Conley Jr. Willard E.
Hinsberg, III William D.
Jones Pamela E.
Welsh Kevin M.
Chea Thorl
International Business Machines - Corporation
Martin Robert B.
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