Radiation-sensitive resin composition

Details Radiation-sensitive resin composition Radiation-sensitive resin composition

2009-09-11

2011-12-27

Chu, John (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S905000, C430S910000

Reexamination Certificate

active

08084188

ABSTRACT:
A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, a radiation-sensitive acid generator, and a solvent. The acid-dissociable group-containing resin includes a copolymer containing a repeating unit. The reparing unit includes an acid-dissociable group-containing repeating unit in an amount of more than about 55 mol % of a total amount of the repeating units in the copolymer. A content of the copolymer in the acid-dissociable group-containing resin is about 90 mass % or more of a total amount of the acid-dissociable group-containing resin.

REFERENCES:
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patent: 7544460 (2009-06-01), Hada et al.
patent: 7682770 (2010-03-01), Hada et al.
patent: 2007/0269754 (2007-11-01), Fujiwara et al.
patent: 2002-145955 (2002-05-01), None
patent: 2002-201232 (2002-07-01), None
patent: 2003-084436 (2003-03-01), None
patent: 2005-068418 (2005-03-01), None

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