Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-11-20
2007-11-20
Berman, Susan (Department: 1711)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C522S111000, C522S148000, C522S059000
Reexamination Certificate
active
10975052
ABSTRACT:
A radiation-sensitive resin composition comprising (A) a resin containing a structural unit of the following formula (I), (B) a resin containing a recurring unit of the following formula (II), and (C) a photoacid generator,wherein R1represents a substituted or unsubstituted divalent (alicyclic) hydrocarbon, R2represents a lower alkyl group or a monovalent (substituted) alicyclic hydrocarbon group, or any two R2s form in combination a divalent (substituted) alicyclic hydrocarbon group, with the remaining R2being a lower alkyl group or a monovalent (substituted) alicyclic hydrocarbon group,wherein R3represents a hydrogen atom, fluorine atom, or trifluoromethyl group, R4represents a (substituted) hydrocarbon group with a valence of (c+1), (substituted) alicyclic hydrocarbon with a valence of (c+1), or (substituted) aromatic group with a valence of (c+1), R5represents a hydrogen atom or a monovalent acid-dissociable group, a and b individually represent an integer of 0-3, provided that (a+b)≧1 is satisfied, and c is an integer of 1-3. The radiation-sensitive resin composition has a high transparency at a wavelength of 193 nm or less and is particularly excellent in LER.
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Nishimura Isao
Shimokawa Tsutomu
Sugiura Makoto
Berman Susan
JSR Corporation
Merchant & Gould P.C.
Raimund Christopher W.
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