Radiation sensitive resin composition

Details Radiation sensitive resin composition Radiation sensitive resin composition

1995-10-02

1998-01-13

Tucker, Philip

Compositions

Radiation sensitive

430191, 430192, 430193, 430165, 430326, G03C 100, G03C 152

Patent

active

057075581

ABSTRACT:
A radiation sensitive resin composition containing an alkali soluble resin and a 1,2-quinonediazide compound of a polyphenol or a radiation sensitive resin composition containing an alkali soluble resin and a 1,2-quinonediazide compound and a polyphenol compound.

REFERENCES:
patent: 5178986 (1993-01-01), Zampini et al.
patent: 5288587 (1994-02-01), Osaki et al.
patent: 5376497 (1994-12-01), Kawata et al.
patent: 5384228 (1995-01-01), Doi et al.
patent: 5429904 (1995-07-01), Nagase et al.
patent: 5451484 (1995-09-01), Nagase et al.
patent: 5468590 (1995-11-01), Hashimoto et al.

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