Radiation-sensitive mixture containing acid labile groups and pr

Details Radiation-sensitive mixture containing acid labile groups and pr Radiation-sensitive mixture containing acid labile groups and pr

1989-05-16

1991-12-17

Hamilton, Cynthia

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430176, 430192, 430921, 430914, 430910, 430905, 430330, 430296, 430325, 430967, 522 31, 522 32, G03F 7039, G03F 7075, G03F 730, G03F 740

Patent

active

050734741

ABSTRACT:
A radiation sensitive mixture suitable for producing relief patterns contains

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Crivello, "Org. Coatings and Appl. Polym. Sci.", 48, pp. 65-69 (1985).
Ito, "J. Polym. Sci., Part A, Polym-Chem. Ed.", vol. 24, 2971-2980 (1986).
Pampalone, "Solid State Technology", (Novolak Resins Used in Positive Resist Systems) Jun. 1984, pp. 115-120.
S. Peter Papos, Journal of Imaging Technology, vol. 11, No. 4, Aug. 1985, pp. 146-157.

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