Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1990-01-05
1991-10-29
Scalzo, Catherine S. Kilby
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
25218643, 252600, 423415P, 423582, 423584, 423606, G03C 172
Patent
active
050615998
ABSTRACT:
A radiation-sensitive material comprising a polyacid composed of tungsten and niobium, titanium and/or tantalum. A uniform film can be formed by an easy spin coating method. The polyacid has a radiation sensitivity higher than that of a polyacid comprising only tungsten.
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Ishikawa Akira
Iwayanagi Takao
Kudo Tetsuichi
Miyauchi Katsuki
Murai Fumio
Hitachi , Ltd.
Kilby Scalzo Catherine S.
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