Radiation sensitive compositions of terpolymers containing organ

Details Radiation sensitive compositions of terpolymers containing organ Radiation sensitive compositions of terpolymers containing organ

1998-10-26

2000-03-28

Lipman, Bernard

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

526266, 526270, 526279, G03C 172

Patent

active

060429895

ABSTRACT:
A radiation sensitive composition comprising (a) a terpolymer containing 20 to 70 mole percent of an acid-labile repeating unit, 3 to 40 mole percent of an acrylic or acrylonitrile based repeating unit and a repeating unit containing silicon side-chains and (b) a photo-acid generator. The silicon content of terpolymer is 7 to 20 weight percent. The composition is used primarily in the formulation of multilayer positive operating photoresists.

REFERENCES:
patent: 4481049 (1984-11-01), Reichmanis et al.
patent: 5102771 (1992-04-01), Vogel et al.
patent: 5369200 (1994-11-01), Schaedeli et al.
patent: 5552260 (1996-09-01), Vogel et al.
patent: 5886119 (1999-03-01), Schaedeli et al.

Affiliated with

Also associated with

Rating

Radiation sensitive compositions of terpolymers containing organ does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radiation sensitive compositions of terpolymers containing organ, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radiation sensitive compositions of terpolymers containing organ will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1324688