Radiation sensitive coating composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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20415914, 427 431, 430296, 430326, G03C 168

Patent

active

044093179

ABSTRACT:
A radiation sensitive coating composition comprising (a) an alkali soluble resin such as a phenolic resin, poly(p-vinylphenol) or a halogenated poly(p-vinylphenol), (b) poly(2-methylpentene-1-sulfone), and (c) a solvent containing isoamyl acetate as major component can give a positive-type radiation sensitive resist film with good compatibility of the resin components and other good properties.

REFERENCES:
patent: 3935331 (1976-01-01), Poliniak et al.
patent: 4267257 (1981-05-01), Poliniak et al.
patent: 4289845 (1981-09-01), Bowden et al.

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