Radiation heated acceleration

Details Radiation heated acceleration Radiation heated acceleration

1977-12-29

1979-03-27

Rolinec, Rudolph V.

Electric lamp and discharge devices

With temperature modifier

313 27, 313 47, 313359, 313360, 313362, 250309, H01J 724

Patent

active

041468104

ABSTRACT:
In an ion implantation apparatus, a beam defining member such as the acceleration plate is constructed such that the member is maintained at a temperature above the condensation point of the vapor emanating from the source of charged particles, thereby preventing the vapor from condensing on the member and providing a self-cleaning effect.

REFERENCES:
patent: 3631282 (1971-12-01), Herb
patent: 4011449 (1977-03-01), Ko et al.

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