Radiation heat shield for silicon melt-in manufacturing of singl

Details Radiation heat shield for silicon melt-in manufacturing of singl Radiation heat shield for silicon melt-in manufacturing of singl

1988-09-12

1991-04-02

Doll, John

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

422249, 266242, C30B 1500, C30B 3500

Patent

active

050045199

ABSTRACT:
The disclosure relates to a radiation heat shield which is formed of graphite which covers the open end of the crucible of a furnace for forming single crystals of silicon by the Czochralski method. The graphite preferably has a silicon carbide coating thereon. The heat shield is preferably formed in plural segments with a counterweight at one end of each of the segments whereby, upon raising of the crucible, the segments and associated counterweight rotate about a pivot to expose the top of the crucible.

REFERENCES:
patent: 3511610 (1970-05-01), Dohmen et al.
patent: 4330362 (1982-05-01), Zulehner
patent: 4378269 (1983-03-01), Matsushita et al.
patent: 4402786 (1983-09-01), Little
patent: 4406731 (1983-09-01), Chartier
patent: 4440728 (1984-04-01), Stormont et al.
patent: 4544528 (1985-10-01), Stormont et al.

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