X-ray or gamma ray systems or devices – Source
Reexamination Certificate
2006-09-19
2006-09-19
Glick, Edward J. (Department: 2882)
X-ray or gamma ray systems or devices
Source
C250S492200, C250S50400H
Reexamination Certificate
active
07110504
ABSTRACT:
An exposure apparatus for projecting and transferring a pattern on a master onto a surface of a target exposure object by radiation exposure, including a radiation generating unit for generating radiation having a plurality of different wavelengths, and a wavelength selecting unit for selecting a wavelength of the radiation generated by the radiation generating unit. The wavelength selecting unit acquires information on the pattern on the master, and selects a wavelength on the basis of wavelength information or wavelength distribution information contained in the acquired information.
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