Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-11-27
2007-11-27
Huff, Mark F. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S270100, C526S250000, C210S664000, C210S663000
Reexamination Certificate
active
10632643
ABSTRACT:
This invention concerns radiation durable organic compositions which are well-suited for use in 157 nm lithography by virtue of their high transparency and excellent radiation durability, and to a process for the preparation thereof.
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French Roger Harquail
Jones David Joseph
Wheland Robert Clayton
Chacko-Davis Daborah
E. I. du Pont de Nemours and Company
Huff Mark F.
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