Quasi-static fiber pressure sensor

Details Quasi-static fiber pressure sensor Quasi-static fiber pressure sensor

1998-09-24

2000-06-20

Ngo, Hung N.

Optical waveguides

Optical waveguide sensor

356346, G01B 902

Patent

active

060787066

ABSTRACT:
This invention is a quasi-static fiber pressure sensor using self-referenced interferometry based on a broadband semiconductor source which probes the pressure plate deflection within a Fabry-Perot cavity where phase is demodulated with a dual grating spectrometer providing real-time, high resolution remote measurement of pressure using optical interrogation of a deflecting pressure plate. This technique yields absolute gap measurement in real time over a wide range of gap lengths with nanometer resolution. By tailoring the pressure plate design to cover the range of gaps and deflection that can be resolved, pressure sensing with psi resolution can be obtained in a kpsig pressure range.

REFERENCES:
patent: 5361130 (1994-11-01), Kersey et al.
patent: 5416582 (1995-05-01), Knutson et al.
patent: 5452086 (1995-09-01), Bunn
patent: 5748314 (1998-05-01), Kitayoshi
patent: 5804453 (1998-09-01), Chen
Rao et al.; Development Of Prototype Fiber-Optic-Based Fizeau Pressure Sers With Temperature Compensation And Signal Recovery By Coherence Reading; J. Ltwve Tech.; vol. 12 No. 9, pp. 1685-1695; Sep. 1994.

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